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Improved uniformity of implanted dose by a compensated scan pattern generator

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A semi-empirical model for the generatio

✍ Ravinder Nath; Charles E. Gignac; Alfred G. Agostinelli; Sondra Rothberg; Robert 📂 Article 📅 1980 🏛 Elsevier Science 🌐 English ⚖ 804 KB