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Improved process of fabricating AC-coupled silicon micro-strip sensors

✍ Scribed by Wen-Chin Tsay; Jyh-Wong Hong; A. Chen; Willis T. Lin; Ching-Yi Hsu; Shu-Mei Jan; Chien-Li Kuo

Publisher: Elsevier Science
Year: 1994
Tongue: English
Weight: 202 KB
Volume: 351
Category: Article
ISSN: 0168-9002
DOI: 10.1016/0168-9002(94)91375-7

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