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Improved measurements of doping profiles in silicon using CV techniques

✍ Scribed by McGillivray, I.G.; Robertson, J.M.; Walton, A.J.

Book ID: 114535394
Publisher: IEEE
Year: 1988
Tongue: English
Weight: 463 KB
Volume: 35
Category: Article
ISSN: 0018-9383
DOI: 10.1109/16.2437

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