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Improved measurement accuracy in a long trace profiler: Compensation for laser pointing instability

✍ Scribed by Steven C. Irick

Book ID: 103613007
Publisher: Elsevier Science
Year: 1994
Tongue: English
Weight: 341 KB
Volume: 347
Category: Article
ISSN: 0168-9002
DOI: 10.1016/0168-9002(94)91882-1

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