✦ LIBER ✦

Improved hydrogen free chemical vapor deposition of silicon dioxide

✍ Scribed by Yasutaka Uchida; Kohshi Taguchi; Masakiyo Matsumura

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Hydrogen Plasma Treatment of Silicon Dio

✍ Gupta, Vipul; Madaan, Nitesh; Jensen, David S.; Kunzler, Shawn C.; Linford, Matt 📂 Article 📅 2013 🏛 American Chemical Society 🌐 English ⚖ 940 KB

Oxidation of Chemically-Vapor-Deposited

✍ Elizabeth J. Opila; QuynhGiao N. Nguyen 📂 Article 📅 2005 🏛 John Wiley and Sons 🌐 English ⚖ 205 KB

Modeling of Silicon Dioxide Chemical Vap

✍ Romet, S.; Couturier, M. F.; Whidden, T. K. 📂 Article 📅 2001 🏛 The Electrochemical Society 🌐 English ⚖ 223 KB

Properties of hydrogenated amorphous sil

✍ Ellis, F. B.; Gordon, R. G.; Paul, W.; Yacobi, B. G. 📂 Article 📅 1984 🏛 American Institute of Physics 🌐 English ⚖ 887 KB

Properties of hydrogenated amorphous sil

✍ F.B. Ellis Jr; R.G. Gordon; W. Paul; B.G. Yacobi 📂 Article 📅 1983 🏛 Elsevier Science 🌐 English ⚖ 160 KB

Cyclic alkylsilanes as low-pressure chem

✍ Ravi Kumar Laxman; Arthur K. Hochberg; Hansong Cheng; David A. Roberts 📂 Article 📅 1995 🏛 Elsevier Science 🌐 English ⚖ 486 KB