Improved hot-carrier reliability of SOI transistors by deuterium passivation of defects at oxide/silicon interfaces

✍ Scribed by Kangguo Cheng; Jinju Lee; Karl, H.; Lyding, J.W.; Young-Kwang Kim; Young-Wug Kim; Kwang-Pyuk Suh

• Book ID: 114539033
• Publisher: IEEE
• Year: 2002
• Tongue: English
• Weight: 71 KB
• Volume: 49
• Category: Article
• ISSN: 0018-9383
• DOI: 10.1109/16.987128