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Improved fabrication techniques for infrared bolometers

โœ Scribed by Lange, A. E. ;Kreysa, E. ;McBride, S. E. ;Richards, P. L. ;Haller, E. E.


Book ID
105035491
Publisher
Springer
Year
1983
Tongue
English
Weight
818 KB
Volume
4
Category
Article
ISSN
0195-9271

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Fabricating interlocking support walls,
โœ Timothy M. Miller; John H. Abrahams; Christine A. Allen ๐Ÿ“‚ Article ๐Ÿ“… 2006 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 409 KB

We report a fabrication process for deep etching silicon to different depths with a single masking layer, using standard masking and exposure techniques. Using this technique, we have incorporated a deep notch in the support walls of a transition-edge-sensor (TES) bolometer array during the detector