๐”– Bobbio Scriptorium
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Bolometers for far-infrared and submillimetre astronomy

โœ Scribed by M.J Griffin


Book ID
108415727
Publisher
Elsevier Science
Year
2000
Tongue
English
Weight
275 KB
Volume
444
Category
Article
ISSN
0168-9002

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We report a fabrication process for deep etching silicon to different depths with a single masking layer, using standard masking and exposure techniques. Using this technique, we have incorporated a deep notch in the support walls of a transition-edge-sensor (TES) bolometer array during the detector