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Improved Ellipsometer Expansion Coefficients for Thickness Calculations of Thin Films

โœ Scribed by ROWE, E. C.; SHEWCHUN, J.

Book ID
115382246
Publisher
Optical Society of America
Year
1969
Weight
458 KB
Volume
59
Category
Article
ISSN
0030-3941

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## Abstract A novel method has been developed and tested to determine accurately the linear coefficient of thermal expansion ฮฑ of flexible films without subjecting a specimen to a tensile load continuously during the measurement of expansion data. Other methods have invariably required the applicat