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Improved efficiency of aluminum doping in ZnO thin films grown by atomic layer deposition

✍ Scribed by Park, Hui Kyung; Heo, Jaeyeong

Book ID: 122294447
Publisher: Elsevier Science
Year: 2014
Tongue: English
Weight: 867 KB
Volume: 309
Category: Article
ISSN: 0169-4332
DOI: 10.1016/j.apsusc.2014.04.205

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