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Improved dielectric and electrical properties of (Ba,Sr)TiO3thin films using Pt/LaNiO3as the top-electrode material

โœ Scribed by Y.H. Gao; J.L. Sun; J.H. Ma; X.J. Meng; J.H. Chu


Publisher
Springer
Year
2008
Tongue
English
Weight
465 KB
Volume
91
Category
Article
ISSN
1432-0630

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Effect of deposition temperature on the
โœ Feng, Zuyong ;Chen, Wei ;Tan, Ooi Kiang ๐Ÿ“‚ Article ๐Ÿ“… 2009 ๐Ÿ› John Wiley and Sons ๐ŸŒ English โš– 322 KB

## Abstract Ba~0.6~Sr~0.4~TiO~3~ (BST) thin films with the thickness of 300 nm were deposited on Pt/SiO~2~/Si substrates at various deposition temperatures by RF magnetron sputtering technique, and their electric properties were investigated. Due to the high temperature annealing process at substra