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Imprinting polymer film on patterned substrates

✍ Scribed by Tan, L.; Kong, Y. P.; Bao, L.-R.; Huang, X. D.; Guo, L. J.; Pang, S. W.; Yee, A. F.

Book ID
121666085
Publisher
AVS (American Vacuum Society)
Year
2003
Tongue
English
Weight
836 KB
Volume
21
Category
Article
ISSN
0734-211X

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