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Thermally induced wrinkling in thin-film stacks on patterned substrates

✍ Scribed by Srinivasan, K.; Goyal, S.; Siegmund, T.; Subbarayan, G.; Lin, Q.


Book ID
119885919
Publisher
IBM
Year
2009
Tongue
English
Weight
795 KB
Volume
53
Category
Article
ISSN
0018-8646

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