✦ LIBER ✦

Importance of rapid photothermal processing in defect reduction and process integration

✍ Scribed by R. Singh; V. Parihar; Yuanning Chen; K. Poole; S. Nimmagadda; L. Vedula

Book ID: 126631742
Publisher: IEEE
Year: 1999
Tongue: English
Weight: 187 KB
Volume: 12
Category: Article
ISSN: 0894-6507
DOI: 10.1109/66.744520

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Role of rapid photothermal processing in

Role of rapid photothermal processing in process integration

✍ Singh, R.; Nimmagadda, S.V.; Parihar, V.; Chen, Y.; Poole, K.F. 📂 Article 📅 1998 🏛 IEEE 🌐 English ⚖ 199 KB

Advances in rapid thermal and integrated

Advances in rapid thermal and integrated processing

✍ Chris Hill 📂 Article 📅 1997 🏛 Elsevier Science 🌐 English ⚖ 132 KB

This book gives an accurate and comprehensive picture of the current state of Rapid Thermal Processing (RTP) science, technology and application. There is a wealth of data and information, made accessible through a useful subject index. The 19 individually-authored chapters span a wide range of topi

Reduction of process-induced defects in

Reduction of process-induced defects in power devices

✍ H.J. Schulze 📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 402 KB

Integration of reduction and expansion p

Integration of reduction and expansion processes in layout optimization

✍ U. Kirsch 📂 Article 📅 1996 🏛 Springer-Verlag 🌐 English ⚖ 547 KB

Advances in process integration, energy

Advances in process integration, energy saving and emissions reduction

✍ Jiří Klemeš; Ferenc Friedler 📂 Article 📅 2010 🏛 Elsevier Science 🌐 English ⚖ 153 KB

Importance of surface processes in defec

Importance of surface processes in defect formation in a-Si:H

✍ Gautam Ganguly; Akihisa Matsuda 📂 Article 📅 1993 🏛 Elsevier Science 🌐 English ⚖ 452 KB