Rapid thermal annealing of rare earth im
✍
S.M.C. Miranda; M. Peres; T. Monteiro; E. Alves; H.D. Sun; T. Geruschke; R. Vian
📂
Article
📅
2011
🏛
Elsevier Science
🌐
English
⚖ 655 KB
Zinc oxide epilayers grown by metal organic vapour phase epitaxy on (0 0 0 1) sapphire substrates were doped with Praseodymium and Europium by ion implantation. The as-implanted samples were either annealed in air for 20 min in a tube furnace or rapid thermal annealing (RTA) was performed, for 2 min