✦ LIBER ✦

Impact of plasma treatment time on MOCVD-TiN properties and on the electrical performance of deep contacts

✍ Scribed by A Sabbadini; F Cazzaniga; S Alberici; C Bresolin; G Casati; V Cusi; G Pavia; G Queirolo

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Sputter-etching and plasma effects on th

✍ S.S. Ang; H.M. Le; W.D. Brown 📂 Article 📅 1990 🏛 Elsevier Science 🌐 English ⚖ 470 KB

Effects of Surface Treatment on the Elec

✍ Jang, J.-S. ;Park, S.-J. ;Seong, T.-Y. 📂 Article 📅 2002 🏛 John Wiley and Sons 🌐 English ⚖ 246 KB 👁 2 views

The impact of annealing temperature and

✍ M. Grosser; U. Schmid 📂 Article 📅 2010 🏛 Elsevier Science 🌐 English ⚖ 421 KB

Effects of heat treatment on the optical

📂 Article 📅 1978 🏛 Elsevier Science 🌐 English ⚖ 155 KB

Effect of plasma treatment on the micros

✍ Chia-Cheng Ho; Bi-Shiou Chiou 📂 Article 📅 2007 🏛 Springer 🌐 English ⚖ 455 KB