Impact of large angle tilt implantation on the threshold voltages of LDMOS transistors on SOI

✍ Scribed by Hui Xu; Evelyne Lampin; Emmanuel Dubois; Serge Bardy; Franck Murray

• Publisher: Elsevier Science
• Year: 2005
• Tongue: English
• Weight: 274 KB
• Volume: 124-125
• Category: Article
• ISSN: 0921-5107
• DOI: 10.1016/j.mseb.2005.08.036