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Immersion Deposition of Metal Films on Silicon and Germanium Substrates in Supercritical Carbon Dioxide

✍ Scribed by Ye, Xiang R.; Wai, Chien M.; Zhang, Daqing; Kranov, Yanko; McIlroy, David N.; Lin, Yuehe; Engelhard, Mark

No coin nor oath required. For personal study only.

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