✦ LIBER ✦
Deposition of Cu and Ru Thin Films in Deep Nanotrenches/Holes Using Supercritical Carbon Dioxide
✍ Scribed by Kondoh, Eiichi
- Book ID
- 124157094
- Publisher
- Institute of Pure and Applied Physics
- Year
- 2004
- Tongue
- English
- Weight
- 189 KB
- Volume
- 43
- Category
- Article
- ISSN
- 0021-4922
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