IIIB-1 performance of MOS devices and integrated circuits with gate oxides grown by rapid thermal oxidation

✍ Scribed by Nulman, J.; Siu, B.; Krusius, J.P.; Baldwin, A.

• Book ID: 114595769
• Publisher: IEEE
• Year: 1986
• Tongue: English
• Weight: 311 KB
• Volume: 33
• Category: Article
• ISSN: 0018-9383
• DOI: 10.1109/t-ed.1986.22780