III-V integrated circuit fabrication technology

✍ Scribed by Biswas, Dhrubes; Tiku, Shiban Kishan

Publisher: Pan Stanford Publishing
Year: 2016
Tongue: English
Leaves: 706
Category: Library

No coin nor oath required. For personal study only.

✦ Table of Contents

Content: 1. Semiconductor basics --
2. GaAs devices --
3. Phase diagrams and crystal growth of compound semiconductors --
4. Epitaxy --
5. Photolithography --
6. Wet etching, cleaning, and passivation --
7. Plasma processing and dry etching --
8. Deposition processes --
9. Ion implantation and device isolation --
10. Diffusion in III-V compound semiconductors --
11. Ohmic contacts --
12. Schottky diodes and FET processing --
13. HEMT process --
14. HBT processing --
15. BiFET and BiHEMT processing --
16. MOSFET processing --
17. Passive components --
18. Interconnect technology --
19. Backend processing and through-wafer vias --
20. Electroplating --
21. Measurements and characterization --
22. Reliability --
23. GaN devices --
24. RF MEMS.

✦ Subjects

Compound semiconductors.;Integrated circuits.

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