Technology of Integrated Circuits
β D. Widmann, H. Mader, H. Friedrich
π Library
π
2000
π Springer
π English
β¦ LIBER β¦
π
Technology of Integrated Circuits
β Scribed by Dr.-Ing. Dietrich Widmann, Prof. Dr.-Ing. Hermann Mader, Dr.-Ing. Hans Friedrich, Prof. Dr. rer.nat. Walter Heywang, Prof. Dr. techn. Rudolf MΓΌller (auth.)
- Publisher
- Springer-Verlag Berlin Heidelberg
- Year
- 2000
- Tongue
- English
- Leaves
- 354
- Series
- Springer Series in ADVANCED MICROELECTRONICS 2
- Edition
- 1
- Category
- Library
β¬ Acquire This Volume
No coin nor oath required. For personal study only.
β¦ Synopsis
Strongly involved with SIEMENS Corp. in the tremendous recent developments of process technologies for IC fabrication the authors comprehensively record their authoritative knowledge and practical experience. New materials , modern planar technology, process designs for CMOS, Bipolar, BICMOS and smart-power technologies, self-adjusting doping techniques are just a few of the highlights. With its strong application-orientation this is a need-to-have book for professionals in semiconductor industries. Senior students in electrical engineering and physics can use it as a textbook because of the systematic treatment of the subjects. With regard to their later careers as industrial engineers they will particularly appreciate the deep insight into the actual methods and problems of IC manufacturing.
β¦ Table of Contents
Front Matter....Pages I-XVIII
Introduction....Pages 1-2
Basic principles of integrated circuit technology....Pages 3-11
Film technology....Pages 13-93
Lithography....Pages 95-167
Etching technology....Pages 169-206
Doping technology....Pages 207-234
Cleaning technology....Pages 235-248
Process integration....Pages 249-322
Back Matter....Pages 323-340
β¦ Subjects
Electronics and Microelectronics, Instrumentation; Optical and Electronic Materials; Industrial Chemistry/Chemical Engineering
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