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[IEEE TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers - San Francisco, CA, USA (24-27 June 1991)] TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers - An RIE process for submicron, silicon electromechanical structures

✍ Scribed by Zhang, Z.L.; MacDonald, N.C.

Book ID: 127059598
Publisher: IEEE
Year: 1991
Tongue: English
Weight: 550 KB
Category: Article
ISBN-13: 9780879425852
DOI: 10.1109/sensor.1991.148927

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