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[IEEE TRANSDUCERS 2011 - 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference - Beijing, China (2011.06.5-2011.06.9)] 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference - Out-of-plane axis SOI MEMS gyroscope with initially displaced vertical sensing comb

✍ Scribed by Maeda, D.; Jeong, H.; Takubo, C.; Degawa, M.; Yamanaka, K.; Shoji, M.; Goto, Y.

Book ID: 126660120
Publisher: IEEE
Year: 2011
Weight: 829 KB
Category: Article
ISBN: 145770157X
DOI: 10.1109/TRANSDUCERS.2011.5969129

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