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[IEEE The Fifth International Conference on Advanced Semiconductor Devices and Microsystems, 2004. ASDAM 2004. - Smolenice Castle, Slovakia (Oct. 17-21, 2004)] The Fifth International Conference on Advanced Semiconductor Devices and Microsystems, 2004. ASDAM 2004. - Micro-mechanical characterisation for MEMS thin films by bending μ-machined cantilevers

✍ Scribed by He, J.H.; Moore, D.F.; Taylor, H.; Boutchich, M.; Boyle, P.; McShane, G.; Hopcroft, M.; Luo, J.K.

Book ID: 126634507
Publisher: IEEE
Year: 2004
Weight: 846 KB
Category: Article
DOI: 10.1109/ASDAM.2004.1441217

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