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[IEEE The Fifth International Conference on Advanced Semiconductor Devices and Microsystems, 2004. ASDAM 2004. - Smolenice Castle, Slovakia (Oct. 17-21, 2004)] The Fifth International Conference on Advanced Semiconductor Devices and Microsystems, 2004. ASDAM 2004. - Growth and properties of ruthenium based metal gates for pMOS devices

✍ Scribed by Frohlich, K.; Husekova, K.; Machajdik, D.; Luptak, R.; Tapajna, M.; Hooker, J.C.

Book ID: 120580484
Publisher: IEEE
Year: 2004
Weight: 985 KB
Category: Article
DOI: 10.1109/ASDAM.2004.1441184

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