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[IEEE The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. - Seoul, Korea (June 5-9, 2005)] The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. - Impact of slot location on thermoelastic dissipation in micromechanical resonators

✍ Scribed by Candler, R.N.; Hopcroft, M.; Low, C.W.; Chandorkar, S.; Kim, B.; Varghese, M.; Dowel, A.; Kenny, T.W.

Book ID: 125431623
Publisher: IEEE
Year: 2005
Weight: 570 KB
Volume: 1
Category: Article
ISBN-13: 9780780389946
DOI: 10.1109/sensor.2005.1496488

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