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[IEEE Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems - Las Vegas, NV, USA (20-24 Jan. 2002)] Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.02CH37266) - A scanning micromirror with angular comb drive actuation

✍ Scribed by Patterson, P.R.; Dooyoung Hah, ; Hung Nguyen, ; Toshiyoshi, H.; Ru-min Chao, ; Wu, M.C.

Book ID: 121793980
Publisher: IEEE
Year: 2002
Tongue: English
Weight: 532 KB
Category: Article
ISBN-13: 9780780371859
DOI: 10.1109/MEMSYS.2002.984329

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