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[IEEE Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems - Las Vegas, NV, USA (20-24 Jan. 2002)] Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.02CH37266) - A direct plasma etch approach to high aspect ratio polymer micromachining with applications in bioMEMS and CMOS-MEMS

✍ Scribed by Zahn, J.D.; Gabriel, K.J.; Fedder, G.K.

Book ID: 121723590
Publisher: IEEE
Year: 2002
Tongue: English
Weight: 1009 KB
Category: Article
ISBN-13: 9780780371859
DOI: 10.1109/MEMSYS.2002.984223

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