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[IEEE Technical Digest MEMS 2001 14th IEEE International Conference on Micro Electro Mechanical Systems - Interlaken, Switzerland (21-25 Jan 2001)] Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090) - A centrally-clamped parallel-beam bistable MEMS mechanism

✍ Scribed by Qiu, J.; Lang, J.H.; Slocum, A.H.

Book ID: 126237031
Publisher: IEEE
Year: 2001
Weight: 658 KB
Edition: Revised
Category: Article
ISBN-13: 9780780359987
DOI: 10.1109/MEMSYS.2001.906551

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