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[IEEE Technical Digest IEEE Solid-State Sensor and Actuator Workshop - Hilton Head Island, SC, USA (22-25 June 1992)] Technical Digest IEEE Solid-State Sensor and Actuator Workshop - A diffusion/chemical reaction model for HE etching of LPCVD phosphosilicate glass sacrificial layers

✍ Scribed by Monk, D.J.; Soane, D.S.; Howe, R.T.

Book ID: 121790168
Publisher: IEEE
Year: 1992
Tongue: English
Weight: 383 KB
Category: Article
ISBN-13: 9780780304567
DOI: 10.1109/SOLSEN.1992.228279

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