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[IEEE Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.99CH36291) - Orlando, FL, USA (1999.01.21-1999.01.21)] Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.99CH36291) - A lateral capacitive CMOS accelerometer with structural curl compensation

✍ Scribed by Gang Zhang, ; Huikai Xie, ; de Rosset, L.E.; Fedder, G.K.

Book ID: 120972891
Publisher: IEEE
Year: 1999
Weight: 771 KB
Category: Article
ISBN-13: 9780780351943
DOI: 10.1109/MEMSYS.1999.746897

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