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[IEEE Proceedings. Japan IEMT Symposium, Sixth IEEE/CHMT International Electronic Manufacturing Technology Symposium - Nara, Japan (26-28 April 1989)] Proceedings. Japan IEMT Symposium, Sixth IEEE/CHMT International Electronic Manufacturing Technology Symposium - Yttria stabilized zirconia thin film prepared by RF magnetron sputtering method

✍ Scribed by Onuma, Y.; Yamakawa, H.; Tomura, T.; Kunugi, K.; Kamimura, K.

Book ID: 127159748
Publisher: IEEE
Year: 1989
Weight: 320 KB
Category: Article
DOI: 10.1109/iemts.1989.76104

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