𝔖 Bobbio Scriptorium

✦ LIBER ✦

[IEEE Ninth International Workshop on Micro Electromechanical Systems - San Diego, CA, USA (11-15 Feb. 1996)] Proceedings of Ninth International Workshop on Micro Electromechanical Systems - Single-crystal silicon actuator arrays for micro manipulation tasks

✍ Scribed by Bohringer, K.-F.; Donald, B.R.; MacDonald, N.C.

Book ID: 127117890
Publisher: IEEE
Year: 1996
Tongue: English
Weight: 898 KB
Category: Article
ISBN-13: 9780780329850
DOI: 10.1109/memsys.1996.493821

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

[IEEE Ninth International Workshop on Mi

[IEEE Ninth International Workshop on Micro Electromechanical Systems - San Diego, CA, USA (11-15 Feb. 1996)] Proceedings of Ninth International Workshop on Micro Electromechanical Systems - Micromachined polymer magnets

✍ Lagorce, L.K.; Allen, M.G. 📂 Article 📅 1996 🏛 IEEE 🌐 English ⚖ 661 KB

[IEEE Ninth International Workshop on Mi

[IEEE Ninth International Workshop on Micro Electromechanical Systems - San Diego, CA, USA (11-15 Feb. 1996)] Proceedings of Ninth International Workshop on Micro Electromechanical Systems - Adhesion forces reduction for micro manipulation based on micro physics

✍ Arai, F.; Andou, D.; Fukuda, T. 📂 Article 📅 1996 🏛 IEEE 🌐 English ⚖ 833 KB

[IEEE Ninth International Workshop on Mi

[IEEE Ninth International Workshop on Micro Electromechanical Systems - San Diego, CA, USA (11-15 Feb. 1996)] Proceedings of Ninth International Workshop on Micro Electromechanical Systems - Fast mixing by lamination

✍ Branebjerg, J.; Gravesen, P.; Krog, J.P.; Nielsen, C.R. 📂 Article 📅 1996 🏛 IEEE 🌐 English ⚖ 778 KB

[IEEE Ninth International Workshop on Mi

[IEEE Ninth International Workshop on Micro Electromechanical Systems - San Diego, CA, USA (11-15 Feb. 1996)] Proceedings of Ninth International Workshop on Micro Electromechanical Systems - Single- and multi-layer electroplated microaccelerometers

✍ Konaka, Y.; Allen, M.G. 📂 Article 📅 1996 🏛 IEEE 🌐 English ⚖ 847 KB

[IEEE Ninth International Workshop on Mi

[IEEE Ninth International Workshop on Micro Electromechanical Systems - San Diego, CA, USA (11-15 Feb. 1996)] Proceedings of Ninth International Workshop on Micro Electromechanical Systems - Nanotribology and nanomechanics of MEMS devices

✍ Bhushan, B. 📂 Article 📅 1996 🏛 IEEE 🌐 English ⚖ 986 KB

[IEEE Ninth International Workshop on Mi

[IEEE Ninth International Workshop on Micro Electromechanical Systems - San Diego, CA, USA (11-15 Feb. 1996)] Proceedings of Ninth International Workshop on Micro Electromechanical Systems - A Coriolis mass flow sensor structure in silicon

✍ Enoksson, P.; Stemme, G.; Stemme, E. 📂 Article 📅 1996 🏛 IEEE 🌐 English ⚖ 712 KB