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[IEEE Ninth International Workshop on Micro Electromechanical Systems - San Diego, CA, USA (11-15 Feb. 1996)] Proceedings of Ninth International Workshop on Micro Electromechanical Systems - A Coriolis mass flow sensor structure in silicon

✍ Scribed by Enoksson, P.; Stemme, G.; Stemme, E.

Book ID: 120209659
Publisher: IEEE
Year: 1996
Tongue: English
Weight: 712 KB
Category: Article
ISBN-13: 9780780329850
DOI: 10.1109/MEMSYS.1996.493846

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