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[IEEE Ninth International Workshop on Micro Electromechanical Systems - San Diego, CA, USA (11-15 Feb. 1996)] Proceedings of Ninth International Workshop on Micro Electromechanical Systems - Scaling of thermal CMOS gas flow microsensors: experiment and simulation

✍ Scribed by Mayer, F.; Salis, G.; Funk, J.; Paul, O.; Baltes, H.

Book ID: 120927086
Publisher: IEEE
Year: 1996
Tongue: English
Weight: 814 KB
Category: Article
ISBN-13: 9780780329850
DOI: 10.1109/MEMSYS.1996.493839

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