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[IEEE Multi-Physics simulation and Experiments in Microelectronics - Freiburg im Breisgau, Germany (2008.04.20-2008.04.23)] EuroSimE 2008 - International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Micro-Systems - A perturbation finite element method for modeling electrostatic MEMS without remeshing

✍ Scribed by Boutaayamou, Mohamed; Sabariego, Ruth V.; Dular, Patrick

Book ID: 118258247
Publisher: IEEE
Year: 2008
Weight: 576 KB
Volume: 0
Category: Article
ISBN: 1424421284
DOI: 10.1109/esime.2008.4525012

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