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[IEEE International Reliability Physics Symposium - Dallas, TX, USA (30 March-4 April 2003)] 2003 IEEE International Reliability Physics Symposium Proceedings, 2003. 41st Annual. - Reliability of MEMS-based mass-flow controllers for semiconductor processing

✍ Scribed by Lawrence, E.D.; Henning, A.K.

Book ID: 126673786
Publisher: IEEE
Year: 2003
Weight: 410 KB
Category: Article
ISBN-13: 9780780376496
DOI: 10.1109/RELPHY.2003.1197795

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