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[IEEE International Conference on Indium Phosphide and Related Materials - Santa Barbara, CA, USA (12-16 May 2003)] International Conference onIndium Phosphide and Related Materials, 2003. - Fabrication of 0.1μm-gate InP HEMTs using i-line lithography

✍ Scribed by Sawada, K.; Makiyama, K.; Takahashi, T.; Nozaki, K.; Igarashi, M.; Kon, J.; Hara, N.

Book ID: 126651985
Publisher: IEEE
Year: 2003
Weight: 228 KB
Category: Article
ISBN-13: 9780780377042
DOI: 10.1109/ICIPRM.2003.1205313

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