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[IEEE IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006. - Big Sky, MT, USA (2006.08.21-2006.08.24)] IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006. - Piezoelectric Deformable MEMS Mirror for Adaptive Optics Composed of PZT Thin Films

✍ Scribed by Kanno, I.; Kunisawa, T.; Kotera, H.

Book ID: 120829084
Publisher: IEEE
Year: 2006
Weight: 426 KB
Category: Article
ISBN-13: 9780780395626
DOI: 10.1109/OMEMS.2006.1708312

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