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[IEEE IEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems - Kyoto, Japan (19-23 Jan. 2003)] The Sixteenth Annual International Conference on Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE - Two axis-of-rotation mirror array using electromagnetic MEMS

✍ Scribed by Bernstein, J.; Taylor, W.P.; Brazzle, J.; Kirkos, G.; Odhner, J.; Pareek, A.; Zai, M.

Book ID: 121243252
Publisher: IEEE
Year: 2003
Weight: 324 KB
Category: Article
ISBN-13: 9780780377448
DOI: 10.1109/MEMSYS.2003.1189739

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