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[IEEE IEEE Micro Electro Mechanical Systems An Investigation of Micro Structures, Sensors, Actuators, Machines and Robotic Systems - Oiso, Japan (25-28 Jan. 1994)] Proceedings IEEE Micro Electro Mechanical Systems An Investigation of Micro Structures, Sensors, Actuators, Machines and Robotic Systems - Speed control of elastic force motors by means of integrated piezoelectric sensors

✍ Scribed by Racine, G.-A.; Beuret, C.; Luthier, R.; de Rooij, N.F.

Book ID: 126678357
Publisher: IEEE
Year: 1994
Weight: 589 KB
Category: Article
ISBN-13: 9780780318335
DOI: 10.1109/MEMSYS.1994.555610

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