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[IEEE IEEE Micro Electro Mechanical Systems An Investigation of Micro Structures, Sensors, Actuators, Machines and Robotic Systems - Oiso, Japan (25-28 Jan. 1994)] Proceedings IEEE Micro Electro Mechanical Systems An Investigation of Micro Structures, Sensors, Actuators, Machines and Robotic Systems - Vacuum-encapsulated thermistor bolometer type miniature infrared sensor

✍ Scribed by Mori, T.; Kudoh, T.; Komatsu, K.; Kimura, M.

Book ID: 121860456
Publisher: IEEE
Year: 1994
Tongue: English
Weight: 481 KB
Category: Article
ISBN-13: 9780780318335
DOI: 10.1109/MEMSYS.1994.555766

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