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[IEEE IEEE International Solid-State Sensors and Actuators Conference - Boston, MA, USA (8-12 June 2003)] TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) - Investigation of energy loss mechanisms in micromechanical resonators

✍ Scribed by Candler, R.N.; Li, H.; Lutz, M.; Park, W.-T.; Partridge, A.; Yama, G.; Kenny, T.W.

Book ID: 125449415
Publisher: IEEE
Year: 2003
Tongue: English
Weight: 338 KB
Volume: 1
Category: Article
ISBN-13: 9780780377318
DOI: 10.1109/sensor.2003.1215320

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