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[IEEE IEEE Eleventh Annual International Workshop on Micro Electro Mechanical Systems An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems - Heidelberg, Germany (25-29 Jan. 1998)] Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176) - Design and fabrication of high-performance polysilicon vibrating ring gyroscope

✍ Scribed by Ayazi, F.; Najafi, K.

Book ID: 125549519
Publisher: IEEE
Year: 1998
Weight: 1006 KB
Category: Article
ISBN-13: 9780780344129
DOI: 10.1109/MEMSYS.1998.659829

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