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✦ LIBER ✦

[IEEE IEEE Eleventh Annual International Workshop on Micro Electro Mechanical Systems An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems - Heidelberg, Germany (25-29 Jan. 1998)] Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176) - A high-speed mass flow sensor with heated silicon carbide bridges

✍ Scribed by Lyons, C.; Friedberger, A.; Welser, W.; Muller, G.; Krotz, G.; Kassing, R.

Book ID: 121241273
Publisher: IEEE
Year: 1998
Weight: 561 KB
Category: Article
ISBN-13: 9780780344129
DOI: 10.1109/MEMSYS.1998.659782

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