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[IEEE IEEE Conference Record - Abstracts. 1996 IEEE International Conference on Plasma Science - Boston, MA, USA (3-5 June 1996)] IEEE Conference Record - Abstracts. 1996 IEEE International Conference on Plasma Science - Kinetics and radiative processes in Xe/I/sub 2/ inductively coupled RF discharges at low pressure

✍ Scribed by Barnes, P.N.; Verdeyen, J.T.; Kushner, M.J.

Book ID: 111895455
Publisher: IEEE
Year: 1996
Weight: 134 KB
Volume: 0
Category: Article
ISBN-13: 9780780333222
DOI: 10.1109/plasma.1996.551526

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