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[IEEE IEEE 4th Technical Digest on Solid-State Sensor and Actuator Workshop - Hilton Head Island, SC, USA (1990.06.4-1990.06.7)] IEEE 4th Technical Digest on Solid-State Sensor and Actuator Workshop - Electrically-activated, micromachined diaphragm valves

✍ Scribed by Jerman, H.

Book ID: 126789783
Publisher: IEEE
Year: 1990
Weight: 433 KB
Category: Article
DOI: 10.1109/solsen.1990.109822

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