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[IEEE IEEE 4th Technical Digest on Solid-State Sensor and Actuator Workshop - Hilton Head Island, SC, USA (1990.06.4-1990.06.7)] IEEE 4th Technical Digest on Solid-State Sensor and Actuator Workshop - Deep X-ray and UV lithographies for micromechanics

✍ Scribed by Guckel, H.; Christenson, T.R.; Skrobis, K.J.; Denton, D.D.; Choi, B.; Lovell, E.G.; Lee, J.W.; Bajikar, S.S.; Chapman, T.W.

Book ID: 120765298
Publisher: IEEE
Year: 1990
Weight: 619 KB
Category: Article
DOI: 10.1109/SOLSEN.1990.109834

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