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[IEEE IEEE 4th Technical Digest on Solid-State Sensor and Actuator Workshop - Hilton Head Island, SC, USA (1990.06.4-1990.06.7)] IEEE 4th Technical Digest on Solid-State Sensor and Actuator Workshop - High-stress and overrange behavior of sealed-cavity polysilicon pressure sensors

✍ Scribed by Chau, K.H.; Fung, C.D.; Harris, P.R.; Panagou, J.G.

Book ID: 118234903
Publisher: IEEE
Year: 1990
Weight: 238 KB
Volume: 0
Category: Article
DOI: 10.1109/solsen.1990.109849

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